Flow range (N2 equivalent,
20℃/1 atm) |
1 SCCM–20 SLM (The conditions are freely selectable) |
| Sensor |
Thermal mass flow sensor |
| Valve type |
Proportional solenoid valve (closed when not energized) |
| Control range |
2–100% (F.S.) |
| Response |
1 sec. or less (0–100% within ±2% typical) |
| Accuracy |
±1% F.S. (Accuracy guaranteed at 15–35℃) |
| Repeatability |
±0.2%F.S. |
Operating differential
pressure |
F.S. ≤ 5 SLM: 50–300 kPa |
| F.S. > 5 SLM: 100–300 kPa |
| Option: Low differential pressure (LP) specification is available depending on conditions. |
| Allowable operating pressure |
300 kPa (G) or less |
| Proof pressure |
980 kPa (G) |
| Leak rate |
1 × 10-11 Pa·m3/s or less |
| Allowable ambient temperature |
0–50℃ |
| Allowable ambient humidity |
10–90% (No condensation allowed) |
Materials of parts in
contact with gases |
Body: SUS316L |
| Diaphragm:SUS316L |
| Valve seat: PTFE |
| Sealing: SUS316L, Ni, Au |
| Option: SUS seal (SU), inner surface polish (KP) |
| Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
| Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) |
| Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more) |
| Required power supply |
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
| Joint (Main unit bore) |
Standard: 1/4 VCR equivalent Option: 1/4 SWL |
| Weight |
Approx. 1000 g |
huy@ansgroup.asia
0934039951
0934039951
