| Sensor type |
Thermal sensor |
| Valve type |
Normally closed proportional solenoid valve |
| Applicable gases*1 |
N2 (Air, H2, He, Ar, O2, CO2)*2 |
| Flow range*3 |
10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2 |
| Control range |
2 to 100% (F.S.) |
| Response*4 |
Total flow rate control range ±1 sec (within ±2% F.S.) |
| Accuracy*5 |
±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.) |
| Repeatability |
±0.25% F.S. |
| Operating differential pressure*6 |
50 to 300 kPa (100 to 300 kPa for Ar and CO2) |
| Inlet maximum pressure |
500kPa（G） |
| Proof pressure |
980kPa（G） |
| External leak rate |
≤1.0 x 10-8 Pa·m3/sec (He) |
| Temperature |
Working temp. |
5 to 50℃ |
| Accuracy guaranteed temp. |
15 to 35℃ |
| Allowable storage temp. |
-10 to 60℃ |
Permissible ambient humidity
Allowable operating humidity |
10 to 90% RH (without dew condensation) |
| Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM |
| Electrical connection |
D-sub 15-pin male, high density, HR-10A (two) |
| Flow rate setting signal |
0 to 5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω) |
| Flow rate output signal |
0 to 5 V DC (load resistance 10 kΩ), or 4 to 20 mA (load resistance ≤ 500 Ω) |
| Digital communication |
Address setting with RS485 rotary switch or indicator: up to 99 devices (9600 bps) |
| Event input |
Three contact inputs (non-insulated) |
| Event output |
Three NPN open collectors (non-insulated, max. rating 35 V, 50 mA) |
| Required power supply (DC) |
+24 V DC (±10%), 300 mA max. (DC jack, D-sub) |
| Joint*7 |
1/4 F900 (standard), 1/4 UJR, Rc 1/4 |
| Mounting posture |
Horizontal installation recommended. |
| Weight*8 |
Approx. 950 g |
| *1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist. |
| *2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the |
| specified full scale. |
| *3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm. |
| *4 Guarantee for calibration gas: N2. |
| *5 Accuracy for calibration gas: N2, flow range (max. full scale). |
| *6 The operating differential pressure may differ depending on specifications. |
| *7 Contact us for any other joints. |
| *8 Exclusive of weight of joint. |
| |
huy@ansgroup.asia
0934039951
0934039951
