0934039951DF-350C Thiết bị kiểm soát lưu lượng Kofloc Vietnam ANSdanang
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | ||
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
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| Flow range*2 | 10 SCCM to 10 SLM | 20 to 50 SLM (20 to 30 SLM for CO2) |
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| Control range | 2 to 100% (F.S.) | ||
| Response*3 | Total flow rate control range ≤ 1 sec (within ±2% F.S.) | ||
| Accuracy*4 | ±1.0% F.S. | ||
| Repeatability | ±0.25%F.S. | ||
| Operating differential pressure*5 | 50 to 300 kPa (100 to 300 kPa for Ar and CO2) | 100 to 300 kPa (150 to 300 kPa for Ar and CO2) | |
| Inlet maximum pressure | 500kPa（G） | ||
| Proof pressure | 980kPa（G） | ||
| External leak rate | ≤ 1.0 x 10-8 Pa·m3/sec (He) | ||
| Temperature | Working temp. | 5 to 50℃ | |
| Accuracy guaranteed temp. | 15 to 35℃ | ||
| Allowable storage temp. | -10 to 60℃ | ||
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | ||
| Materials of gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | ||
| Electrical connection | D-sub 15-pin male, high density, HR-10A (two) | ||
| Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω) | ||
| Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ), or 4 to 20 mA (load resistance ≤ 500 Ω) | ||
| Digital communication | Address setting with RS485 rotary switch or indicator: up to 99 devices (9600 bps) | ||
| Event input | Three contact inputs (non-insulated) | ||
| Event output | Three NPN open collectors (non-insulated, max. rating 35 V, 50 mA) | ||
| Required power supply (DC) | +24 V DC (±10%), 300 mA max. (DC jack, D-sub) | ||
| Joint*6 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | ||
| Mounting posture | Horizontal installation recommended. | ||
| Weight*7 | Approx. 950 g | Approx. 1100 g | |
| *1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist. | |||
| *2 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm. | |||
| *3 Guarantee for calibration gas: N2. | |||
| *4 Accuracy for calibration gas: N2, flow range (max. full scale). | |||
| *5 The operating differential pressure may differ depending on specifications. | |||
| *6 Contact us for any other joints. | |||
| *7 Exclusive of weight of joint. | |||
