| Model |
Mass Flow Controller |
Mass Flow Meter |
|
| EX-250SC |
EX-250SM |
|
| Sensor type |
Thermal sensor |
|
| Valve type |
Normally closed proportional solenoid valve |
- |
|
| Applicable gases（*1） |
N2、Air、H2、He、Ar、O2、CO2 etc. |
|
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
|
| Flow range（*2） |
10SCCM ～ 5SLM |
|
| Control（measure）range |
2 ～ 100%(F.S.) |
|
| Response |
≤ 1sec （within ± 2%F.S.）（*8） |
|
| Accuracy（*3） |
± 1.0%F.S. |
|
| Repeatability |
± 0.2%F.S. |
|
| Operating differential pressure（*4） |
50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa） |
- |
|
| Inlet maximum pressure |
500kPa（G） |
|
| Proof pressure |
980kPa（G） |
|
| External leak rate（He） |
≤ 1.0 × 10-8Pa・m3/sec |
|
| Temperature |
Working temp. |
5 ～ 50℃ |
|
| Accuracy guaranteed temp. |
15 ～ 35℃ |
|
| Allowable storage temp. |
-10 ～ 60℃ |
|
| Allowable operating humidity |
10 ～ 90%RH (without dew condensation) |
|
| Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel（*5）, PTFE, FKM |
|
| Electrical connection |
Dsub 9pin KFC Standard（SEMI standard compliant） |
|
| HR-10A |
|
| Flow rate setting signal |
0～5VDC(input impedance: approx. 1M Ω) |
- |
|
| or 4～20mA(input impedance: approx. 250 Ω) |
|
| Flow rate output signal |
0 ～ 5VDC( load resistance ≧10k Ω) |
|
| or 4 ～ 20mA( load resistance ≧500 Ω) |
|
| Digital communication |
RS485 rotary-switch address setting |
|
| Required power supply (DC) |
+15VDC( ± 5%)100mA , -15VDC（± 5%）150mA |
|
| or +24VDC（± 10%） ≤180mA (MFM would be ≤100mA) |
|
| Joint（*6） |
1/4F900（standard） |
|
| Mounting posture |
Horizontal installation recommended. |
|
| Weight（*7） |
Approx.500g |
Approx.440g |
|
| |
|
|
|
|
| （*1） The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist. |
|
| （*2） The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm. |
| （*3） Accuracy for calibration gas: N2, flow range (max. full scale). |
|
|
| （*4） The operating differential pressure may differ depending on specifications. |
|
|
| （*5） Mass flow meter does not contain magnetic stainless steel. |
|
|
| （*6） Contact us for any other joints. |
|
|
|
| （*7） Exclusive of weight of joint. |
|
|
|
| （*8） Pressure condition would be needed when you order. |
huy@ansgroup.asia
0934039951
0934039951
